IBM Lithography Roadmap and Need for Future Lithography Tools
- Allen Gabor
- Martin Burkhardt
- et al.
- 2025
- EUVL and Source Workshop 2025
Dario Goldfarb
Title
Research Staff Member
Publications
Dry heterometallic resist processing based on thermal sublimation deposition and development
- Dario Goldfarb
- Scott Lewis
- et al.
- 2022
- JM3
Patents
- US
- 11307496
- US
- 11199778
- US
- 11177130
- US
- 11056418
- US
- 11049789
- US
- 11037786
- US
- 10998191
- US
- 10964541
- US
- 10937764
- US
- 10831102
Top collaborators
LM
Luciana Meli
Senior Manager: Patterning & Metrology
JR
Jed Rankin
Photomask Supply and Development Strategy
AG
Allen Gabor
Distinguished Engineer