Summary Abstract: Electron vibrational spectroscopy of polymer-vacuum and polvmer-metal interfacesJ.E. DemuthT.C. Clark1986JVSTAPaper
Properties and Microelectronic Applications of Thin Films of Refractory Metal NitridesMarc Wittmer1985JVSTAPaper
Summary Abstract: Plasma potentials of 13.56 MHz rf argon glow discharges in a planar systemK. KehlerJ.W. Coburnet al.1985JVSTAPaper