Publications

3541 results for Mathematical Sciences

Compound semiconductor surface and interface problems in liquid phase epitaxy (lpe)
- - M.B. Small
  - R.M. Potemski
- 1989
- Proceedings of SPIE 1989
Linewidth vernier (LWV)
- - B.J. Lin
- 1989
- Proceedings of SPIE 1989
Ultrafast high resolution contact lithography using excimer lasers
- - K. Jain
  - B.J. Lin
- 1989
- Proceedings of SPIE 1989
Characterization of the induction effect at mid-ultraviolet exposure: Application to AZ2400 at 313 nm
- - Donald C. Hofer
  - Grant Willson
  - et al.
- 1989
- Proceedings of SPIE 1989
Proximity effects and influences of nonuniform illumination in projection lithography
- - P.D. Robertson
  - F.W. Wise
  - et al.
- 1989
- Proceedings of SPIE 1989
Resist characterization: Procedures, parameters, and profiles
- - M. Exterkamp
  - W. Wong
  - et al.
- 1989
- Proceedings of SPIE 1989
Cryogenic frequency domain optical mass memory
- - G.C. Bjorklund
  - W. Lenth
  - et al.
- 1989
- Proceedings of SPIE 1989
Electron beam testing and its application to packaging modules for very large scale integrated (vlsi) chip arrays
- - F.J. Hohn
  - T.H.P. Chang
  - et al.
- 1989
- Proceedings of SPIE 1989
Trends in x-ray lithography
- - Juan R. Maldonado
- 1989
- Proceedings of SPIE 1989
Optics and holography in the IBM supermarket scanner
- - Leroy D. Dickson
  - Glenn T. Sincerbox
- 1989
- Proceedings of SPIE 1989