High NA lithographic imagery at Brewster's angle
- Timothy A. Brunner
- Nakgeuon Seong
- et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
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3489 results for Mathematical Sciences
A minimax method for finding multiple critical points and its applications to semilinear PDEs
- Yongxin Li
- Jianxin Zhou
- 2002
- SIAM Journal on Scientific Computing
Nonlinear modelling of periodic threshold autoregressions using TSMARS
- Peter A. W. Lewis
- Bonnie K. Ray
- 2002
- Journal of Time Series Analysis
Interleaved prefetching
- T. Kimbrel
- 2002
- Algorithmica (New York)
Derivations and radicals of polynomial ideals over fields of arbitrary characteristics
- E. Fortuna
- P. Gianni
- et al.
- 2002
- Journal of Symbolic Computation
Aliphatic platforms for the design of 157 nm chemically amplified resists
- Hiroshi Ito
- Hoa D. Truong
- et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
Asymptotically optimal deterministic encoders for constrained systems
- Panu Chaichanavong
- Brian H. Marcus
- 2002
- IEEE International Symposium on Information Theory - Proceedings
EUV photoresist performance results from the VNL and the EUV LLC
- Jonathan Cobb
- Paul Dentinger
- et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
IBM 9.2-Megapixel flat-panel display: Technology and infrastructure
- Steven L. Wright
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
The effect of humidity on deprotection kinetics in chemically amplified resists
- Sean D. Burns
- David R. Medeiros
- et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering