An aerosol model of particle generation during pressure reduction
- J.J. Wu
- Douglas W. Cooper
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
3499 results for Materials Discovery
Bonding at silicon/insulator interfaces
- F.J. Himpsel
- T.F. Heinz
- et al.
- 1990
- Applied Surface Science
Nanomechanics of a Au-lr contact using a bidirectional atomic force microscope
- Sidney R. Cohen
- Gabi Neubauer
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ion temperature gradient driven turbulence in the weak density gradient limit
- Satoshi Hamaguchi
- Wendell Horton
- 1990
- Physics of Fluids B
Epitaxial growth of silicon on Si(001) by scanning tunneling microscopy
- R.J. Hamers
- J.E. Demuth
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface reactions in Si chemical vapor deposition from silane
- S.K. Kuikarni
- H.H. Sawin
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
High rate radio frequency sputtering using in-phase plasma confinement
- James E. Lucy
- John Costable
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Composition and structure of boron nitride films deposited by chemical vapor deposition from borazine
- J. Kouvetakis
- V.V. Patel
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Molecular-beam study of gas-surface chemistry in the ion assisted etching of silicon with atomic and molecular hydrogen and chlorine
- J.W. Coburn
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reactive ion etching of plasma enhanced chemical vapor deposition amorphous silicon and silicon nitride: Feeding gas effects
- Yue Kuo
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films