Publications

3499 results for Materials Discovery

Slope control of molybdenum lines etched with reactive ion etching
- - Yue Kuo
  - J.R. Crowe
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Kinetics and mechanics of Si₂H₆ surface decomposition on Si
- - C.M. Greenlief
  - H.H. Sawin
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Sputtered tungsten for deep submicroncomplementary metal-oxide-semiconductor technology
- - L. Dori
  - A.C. Megdanis
  - et al.
- 1990
- Thin Solid Films
Influence of superimposed hydrostatic pressure on bending fracture and formability of a low carbon steel containing globublar sulfides
- - A.S. Kao
  - H.A. Kuhn
  - et al.
- 1990
- Journal of Engineering Materials and Technology, Transactions of the ASME
Properties of W-N and Mo-N films prepared by reactive sputtering
- - K.K. Shih
  - D.B. Dove
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Lateral dopant profiling on a 100 nm scale by scanning capacitance microscopy
- - C.C. Williams
  - J. Slinkman
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Delocalization of defects: A new model for the Schottky barrier
- - R. Ludeke
  - A. Taleb-Ibrahimi
  - et al.
- 1990
- Applied Surface Science
Density dependence of the electrochemical characteristics of carbon overcoated thin film media
- - Grace L. Gorman
  - John Duran
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface photovoltage on Si(111)-(7x7) probed by optically pumped scanning tunneling microscopy
- - R.J. Hamers
  - K. Markert
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Plasma induced gas heating in electron cyclotron resonance sources
- - S.M. Rossnagel
  - S.J. Whitehair
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films