Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

An aerosol model of particle generation during pressure reduction
- - J.J. Wu
  - Douglas W. Cooper
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Slope control of molybdenum lines etched with reactive ion etching
- - Yue Kuo
  - J.R. Crowe
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
integrated thermal chemical vapor deposition processing for Si technology
- - M. Liehr
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Growth of CoSi₂on Si(001): Structure, defects, and resistivity
- - R.D. Thompson
  - S.S. Iyer
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Density dependence of the electrochemical characteristics of carbon overcoated thin film media
- - Grace L. Gorman
  - John Duran
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Defect microchemistry in Si0₂/Si structures
- - G.W. Rubloff
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface diffractometry and lattice imaging of scanning tunneling microscopy images
- - J.E. Demuth
  - R.J. Hamers
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Molecular beam studies of trapping dynamics
- - W.H. Weinberg
  - C.B. Mullins
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A comparison between aluminum and copper interactions with high-temperature oxide and nitride diffusion barriers
- - A. Charai
  - S.E. Harnstram
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Roughness and porosity characterization of carbon and magnetic films through adsorption isotherm measurements
- - C.L. Wang
  - M.F. Toney
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films