Characterization of defects produced in TEOS thin films due to chemical-mechanical polishing (CMP)
- F.B. Kaufman
- S. Cohen
- et al.
- 1995
- MRS Spring Meeting 1995
Publications
Date
Featured collections
Popular topics
- Materials Discovery
3431 results for Materials Discovery
Polyimide nanofoams for low dielectric applications
- K.R. Carter
- H.J. Cha
- et al.
- 1995
- MRS Spring Meeting 1995
Probing the limits of silicon-based nanoelectronics
- S.J. Wind
- Y. Taur
- et al.
- 1995
- MRS Spring Meeting 1995
Large in-plane lattice expansion in NiAs-MnSb thin films induced by ns laser recrystallization
- Yukiko Kubota
- G. Gorman
- et al.
- 1995
- MRS Spring Meeting 1995
Thermal and mechanical properties of polyimide films
- S.T. Chen
- 1995
- MRS Spring Meeting 1995
Thermal degradation of tantalum-nickel thin film couples
- M.H. Tabacniks
- A.J. Kellock
- et al.
- 1995
- MRS Spring Meeting 1995
Studies of the relationship between megasonics, surface etching, and particle removal in SC-1 solutions
- S.L. Cohen
- D.L. Rath
- et al.
- 1995
- MRS Spring Meeting 1995
Nanosecond structural transformation of magnetic thin films: PtMnSb, structure and magnetic properties
- Yukiko Kubota
- E.E. Marinero
- 1995
- MRS Spring Meeting 1995
Roughness analysis of Si1-xGex films
- R.M. Feenstra
- M.A. Lutz
- et al.
- 1994
- MRS Fall Meeting 1994
Geometric and electronic structure of fullerene film growth as a function of coverage
- B. Reihl
- 1994
- MRS Fall Meeting 1994