Publications

3541 results for Mathematical Sciences

Polymer design for 157 nm chemically amplified resists
- - Hiroshi Ito
  - Greg M. Wallraff
  - et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Silicon-containing resists for 157 nm applications
- - Ratnam Sooriyakumaran
  - Debra Fenzel-Alexander
  - et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Automated search method for AFM and profilers
- - Michael Ray
  - Yves C. Martin
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Feature-shape and line-edge roughness measurement of deep sub-micron lithographic structures using small-angle neutron scattering
- - Eric K. Lin
  - Wen-li Wu
  - et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Tunable anti-reflective coatings with built-in hard mask properties facilitating thin resist processing
- - Arpan P. Mahorowala
  - Katherina Babich
  - et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
A high performance E-beam resist coupling excellent dry etch resistance and sub 100nm resolution for advanced mask and device making
- - Wu-Song Huang
  - Ranee Kwong
  - et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Dynamics of non-ergodic piecewise affine maps of the torus
- - Roy Adler
  - Bruce Kitchens
  - et al.
- 2001
- Ergodic Theory and Dynamical Systems
Lattice Attacks on Digital Signature Schemes
- - N.A. Howgrave-Graham
  - N.P. Smart
- 2001
- Designs, Codes, and Cryptography
Wavelets and their applications in industry
- - M. Kobayashi
- 2001
- Nonlinear Analysis, Theory, Methods and Applications
Combinatorial device fabrication and optimization of multilayer organic LEDs
- - Tilman A. Beierlein
  - Hans-Peter Ott
  - et al.
- 2001
- Proceedings of SPIE 2001