Thick film positive photoresist: development and resolution enhancement technique
- D.R. McKean
- T.P. Russell
- et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Publications
26351 results for Science
Oracle semantics for prolog
- Roberto Barbuti
- Michael Codish
- et al.
- 1995
- Information and Computation
Lithography and fabrication processes for sub-100 nm scale complementary metal-oxide semiconductor
- S.J. Wind
- Y. Taur
- et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Spreading characteristics of thin liquid films of perfluoropolyalkylethers on solid surfaces. Effects of chain-end functionality and humidity
- Byung G. Min
- Jeong W. Choi
- et al.
- 1995
- Tribology Letters
Probing oscillatory exchange coupling with a paramagnet
- C.H. Back
- W. Weber
- et al.
- 1995
- Physical Review B
Adhesion and friction properties of hydrogenated amorphous carbon films measured by atomic force microscopy
- Scott S. Perry
- Gabor A. Somorjai
- et al.
- 1995
- Tribology Letters
Mean-field theory of the morphology transition in stochastic diffusion-limited growth
- Yuhai Tu
- Herbert Levine
- 1995
- Physical Review E
Diazoquinone positive photoresist for x-ray lithography
- A. Aviram
- Daniel Bucca
- et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Parallel diffusion-limited aggregation
- Henry Kaufman
- Alessandro Vespignani
- et al.
- 1995
- Physical Review E
Micromachining applications of a high resolution ultrathick photoresist
- K.Y. Lee
- N. LaBianca
- et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures