ALF: A facility for x-ray lithography
- L. Grant Lesoine
- Kenneth W. Kukkonen
- et al.
- 1990
- Microlithography 1990
Publications
Date
Featured collections
Popular topics
3520 results for Mathematical Sciences
Model for focused ion beam deposition
- J.P. Levin
- P.G. Blauner
- et al.
- 1990
- Microlithography 1990
Electron beam lithography, directions in direct write and mask making
- F.J. Hohn
- 1990
- Microlithography 1990
Frequency upconversion of semiconductor diode lasers
- W. Lenth
- W.J. Kozlovsky
- et al.
- 1990
- SPIE OE/LASE 1990
Optical waveguides in the computer environment a packaging perspective
- Modest M. Oprysko
- 1990
- SPIE OE/LASE 1990
Thickness and angular dependency of color change of TN LCDS
- Alan Lien
- S. Suzuki
- 1990
- Electronic Imaging: Advanced Devices and Systems 1990
Study of epitaxial YBa2Cu3Ox films
- Soon-Gul Lee
- C.C. Chi
- et al.
- 1990
- SPIE Advances in Semiconductors and Superconductors 1990
Superconducting Bi-Sr-Ca-Cu-O films prepared by laser ablation
- A. Gupta
- G. Koren
- et al.
- 1989
- Proceedings of SPIE 1989
Modified polyhydroxystyrenes as matrix resins for dissolution inhibition type photoresists
- G. Pawlowski
- T.P. Sauer
- et al.
- 1990
- Microlithography 1990
A highly etch resistant, negative resist for deep-UV and electron beam lithography
- Dennis R. McKean
- Nicholas J. Clecak
- et al.
- 1990
- Microlithography 1990