Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
We present a new continuation method for computing implicitly defined manifolds. The manifold is represented as a set of overlapping neighborhoods, and extended by an added neighborhood of a boundary point. The boundary point is found using an expression for the boundary in terms of the vertices of a set of finite, convex polyhedra. The resulting algorithm is quite simple, allows adaptive spacing of the computed points, and deals with the problems of local and global overlap in a natural way. The algorithm is robust (the new points need only be near the boundary), and is well suited to problems with large embedding dimension, and small to moderate dimension.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Jonathan Ashley, Brian Marcus, et al.
Ergodic Theory and Dynamical Systems
Mario Blaum, John L. Fan, et al.
IEEE International Symposium on Information Theory - Proceedings
Ruixiong Tian, Zhe Xiang, et al.
Qinghua Daxue Xuebao/Journal of Tsinghua University