Publications

43 results for Nick Fuller

Hydrogen silsesquioxane-based hybrid electron beam and optical lithography for high density circuit prototyping
- - M. Guillorn
  - J. Chang
  - et al.
- 2009
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Trigate 6T SRAM scaling to 0.06 μm²
- - M. Guillorn
  - J. Chang
  - et al.
- 2009
- IEDM 2009
Challenges and solutions of FinFET integration in an SRAM cell and a logic circuit for 22 nm node and beyond
- - H. Kawasaki
  - V.S. Basker
  - et al.
- 2009
- IEDM 2009
High performance and highly uniform gate-all-around silicon nanowire MOSFETs with wire size dependent scaling
- - S. Bangsaruntip
  - G.M. Cohen
  - et al.
- 2009
- IEDM 2009
Porous low-k material etch for 32 nm and beyond
- - Catherine Labelle
  - John Arnold
  - et al.
- 2008
- ADMETA 2008
Low-k spacers for advanced low power CMOS devices with reduced parasitic capacitances
- - Elbert Huang
  - Eric Joseph
  - et al.
- 2008
- IEEE International SOI Conference 2008
Demonstration of highly scaled FinFET SRAM cells with high-Κ/metal gate and investigation of characteristic variability for the 32 nm node and beyond
- - H. Kawasaki
  - M. Khater
  - et al.
- 2008
- IEDM 2008
A multilevel copper/low-k/airgap BEOL technology
- - S.V. Nitta
  - S. Ponoth
  - et al.
- 2007
- ADMETA 2007
FinFET performance advantage at 22nm: An AC perspective
- - M. Guillorn
  - J. Chang
  - et al.
- 2008
- VLSI Technology 2008
Plasma ash processing solutions for advanced interconnect technology
- - N. Fuller
  - M.A. Worsley
  - et al.
- 2008
- Thin Solid Films