Publications

16 results for Darío Gil

Experimental characterization of focusing by high-numerical-aperture zone plates
- - Rajesh Menon
  - Dario Gil
  - et al.
- 2006
- Journal of the Optical Society of America A: Optics and Image Science, and Vision
First microprocessors with immersion lithography
- - D. Gil
  - T. Bailey
  - et al.
- 2005
- SPIE Advanced Lithography 2005
Progress towards developing high performance immersion compatible materials and processes
- - Karen Petrillo
  - Kaushal Patel
  - et al.
- 2005
- Microlithography 2005
Photon-sieve lithography
- - Rajesh Menon
  - Dario Gil
  - et al.
- 2005
- Journal of the Optical Society of America A: Optics and Image Science, and Vision
Maskless lithography
- - Rajesh Menon
  - Amil Patel
  - et al.
- 2005
- Materials Today
Immersion lithography: New opportunities for semiconductor manufacturing
- - Darío Gil
  - Timothy A. Brunner
  - et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures