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- 2022
- Journal of Applied Physics
- Robert Farrell
- Jonathan Lenchner
- et al.
- 2016
- AI Magazine
- 2009
- SPIE Advanced Lithography 2009
- Kehan Tian
- Azalia Krasnoperova
- et al.
- 2009
- SPIE Advanced Lithography 2009
- 2008
- SPIE Advanced Lithography 2008
- G.M. Wallraff
- Carl E. Larson
- et al.
- 2007
- Proceedings of SPIE 2007
- 2006
- SPIE Advanced Lithography 2006
- Michael Tittnich
- John Hartley
- et al.
- 2006
- SPIE Advanced Lithography 2006