Publications

This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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8 results for Dechao Guo

Subtractive Ru Interconnect Enabled by Novel Patterning Solution for EUV Double Patterning and TopVia with Embedded Airgap Integration for Post Cu Interconnect Scaling
- - Chris Penny
  - Koichi Motoyama
  - et al.
- 2022
- IEDM 2022
Critical Elements for Next Generation High Performance Computing Nanosheet Technology
- - Ruqiang Bao
  - Curtis Durfee
  - et al.
- 2021
- IEDM 2021
Gate-Last IO Transistors based on Stacked Gate-All-Around Nanosheet Architecture for Advanced Logic Technologies
- - Maruf Bhuiyan
  - Myungsun Kim
  - et al.
- 2021
- IEDM 2021
Vertical-Transport Nanosheet Technology for CMOS Scaling beyond Lateral-Transport Devices
- - Hemanth Jagannathan
  - Brent Anderson
  - et al.
- 2021
- IEDM 2021
Full Bottom Dielectric Isolation to Enable Stacked Nanosheet Transistor for Low Power and High Performance Applications
- - J. Zhang
  - Julien Frougier
  - et al.
- 2019
- IEDM 2019
Hardware Based Performance Assessment of Vertical-Transport Nanosheet Technology
- - Gen Tsutsui
  - Seunghyun Song
  - et al.
- 2022
- IEDM 2022
Highly Selective SiGe Dry Etch Process for the Enablement of Stacked Nanosheet Gate-All-Around Transistors
- - Curtis Durfee
  - Subhadeep Kal
  - et al.
- 2021
- ECS Meeting 2021
Next-Generation Logic Design Architecture for Vertical-Transport Nanosheets
- - Biswanath (Biswa) Senapati
  - Jeongho Do
  - et al.
- 2023
- SPIE Advanced Lithography + Patterning 2023