Monolithic Stacked FET with Stepped Channels for Future Logic Technologies
- Chen Zhang
- Seungmin Song
- et al.
- 2024
- IEDM 2024
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Dan J. Dechene
Director, Semiconductor Enablement
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James Demarest
Physical Characterization
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Vice President: IBM Semiconductors Global R&D and Albany Operations
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Nick Lanzillo
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