A micromachined W-band iris filter
- Firas Sammoura
- Ying Cai
- et al.
- 2005
- TRANSDUCERS 2005
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18 results for Toshiki Hirano
3 KHz servo bandwidth demonstration by HDD tracking microactuator
- Toshiki Hirano
- Matthew White
- et al.
- 2001
- IMECE 2001
3 kHz servo bandwidth demonstration by HDD tracking microactuator
- Toshiki Hirano
- Matthew White
- et al.
- 2001
- IMECE 2001
HDD tracking microactuator and its integration issues
- Toshiki Hirano
- Long-Sheng Fan
- et al.
- 2000
- IMECE 2000
Dual-stage servo controller for HDD using MEMS actuator
- T. Semba
- T. Hirano
- et al.
- 1999
- INTERMAG 1999
A MICRO-ACTUATOR FOR A HARD-DISK DRIVE FINE TRACKING SERVO
- Toshiki Hirano
- Long-Sheng Fan
- et al.
- 1998
- IMECE 1998
High aspect ratio etching in polymer for microactuator applications
- W.Y. Lee
- J. Gao
- et al.
- 1997
- SPIE Micromachining and Microfabrication 1997
Invar electrodeposition for MEMS application
- T. Hirano
- L.-S. Fan
- 1996
- SPIE Micromachining and Microfabrication 1996
Sub-micron gaps without sub-micron etching
- T. Furuhata
- T. Hirano
- et al.
- 1991
- MEMS 1991
Vibration control of a microactuator for servo application by active damping
- Toshiki Hirano
- 2003
- Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers