Robert P. Ried, H. Jonathon Mamin, et al.
JMEMS
This paper describes a micro-actuator for high-bandwidth tracking servo, where a microactuator is attached between slider and suspension, and moves the slider relative to the suspension. The micro-actuator frequency response measurement proved that this micro-actuator can be modeled as an ideal spring-mass-damper system up to 80 kHz, so that very high bandwidth servo system can be easily designed. The maximum servo bandwidth of 6, 4 kHz was achieved in a drive level experiment, which is the highest bandwidth ever demonstrated as a drive level. A rapid step response time of 0. 2 mS for 0. 6 βm step was also achieved. The experimental bandwidth was not limited by the micro-actuator's resonance mode, but the saturation of the micro-actuator driver. ©1999 IEEE.
Robert P. Ried, H. Jonathon Mamin, et al.
JMEMS
Firas Sammoura, Ying Cai, et al.
TRANSDUCERS 2005
Toshiki Hirano, Dai Kobayashi, et al.
Japanese Journal of Applied Physics
Tetsuo Semba, Toshiki Hirano, et al.
IEEE Transactions on Magnetics