EPI active devices
- G.L. Patton
- B.S. Meyerson
- et al.
- 1990
- Silicon Materials Science and Technology 1990
Publications
73 results for G. Scilla
Process damage and contamination effects for shallow Si implanted GaAs
- H. Barratte
- G. Scilla
- et al.
- 1989
- ECS Meeting 1989
TOF-SIMS study of imidization of polyimide films
- B.N. Eldridge
- W. Reuter
- et al.
- 1989
- ACS PMSE 1989
Carbon incorporation in metal-organic vapor phase epitaxy grown gaas from CHxl4-x, HI, and l2
- N.I. Buchan
- T.F. Kuech
- et al.
- 1990
- Journal of Electronic Materials
Self-Aligned SiGe-Base Heterojunction Bipolar Transistor by Selective Epitaxy Emitter Window (SEEW) Technology
- Joachim N. Burghartz
- James H. Comfort
- et al.
- 1990
- IEEE Electron Device Letters
75-GHz fT SiGe-Base Heterojunction Bipolar Transistors
- Gary L. Patton
- James H. Comfort
- et al.
- 1990
- IEEE Electron Device Letters
Effects of deuterium plasmas on silicon near-surface properties
- J.L. Lindström
- G.S. Oehrlein
- et al.
- 1989
- Journal of Applied Physics
Ion beam enhanced diffusion of B during Si molecular beam epitaxy
- P.R. Pukite
- Subramanian S. Iyer
- et al.
- 1989
- Applied Physics Letters
Experimental evidence of both interstitial- and vacancy-assisted diffusion of Ge in Si
- P. Fahey
- Subramanian S. Iyer
- et al.
- 1989
- Applied Physics Letters
Shallow p+ junction formation by a reverse-type dopant preamorphization scheme
- E. Ganin
- B. Davari
- et al.
- 1989
- Applied Physics Letters