Detection and refractive index identification of submicron particles on surfaces
- M.A. Taubenblatt
- J.S. Batchelder
- 1992
- SPIE Applications in Optical Science and Engineering 1992
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13 results for J.S. Batchelder
SURFACE INSPECTION - RESEARCH AND DEVELOPMENT.
- J.S. Batchelder
- 1986
- Electronics Reliability and Measurement Technology 1986
Review of Contamination Detection on Patterned Surfaces
- J. Samuel Batchelder
- 1989
- Proceedings of SPIE 1989
Highly oriented pyrolytic graphite as a reference surface for optically stimulated electron emission surface quality monitors
- Robert J. Baseman
- J. Samuel Batchelder
- 1993
- Review of Scientific Instruments
Evaluating a novel liquid-borne particle counter based on interferometry. Comparing detection of nearly index-matched particles
- J.S. Batchelder
- M.A. Taubenblatt
- 1993
- Microcontamination
Patterned wafer inspection using spatial filtering for the cluster environment
- M.A. Taubenblatt
- J.S. Batchelder
- 1992
- Applied Optics
Measurement of the size and refractive index of a small particle using the complex forward-scattered electromagnetic field
- M.A. Taubenblatt
- J.S. Batchelder
- 1991
- Applied Optics
Investigation of particle pairing in liquids
- Douglas W Cooper
- J.Samuel Batchelder
- et al.
- 1991
- Journal of Colloid And Interface Science
Interferometric detection of forward scattered light from small particles
- J.S. Batchelder
- M.A. Taubenblatt
- 1989
- Applied Physics Letters
Modeling of luminescence phase delay for nondestructive characterization of Si wafers
- D. Guidotti
- J.S. Batchelder
- et al.
- 1989
- Journal of Applied Physics