Doping reaction of PH3 and B2H6 with Si(100)
- Ming L. Yu
- D.J. Vitkavage
- et al.
- 1986
- Journal of Applied Physics
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3 results for D.J. Vitkavage
Summary Abstract: Comparison between the adsorption of PH3 and B2H6 on Si surfaces as related to the CVD of Si
- M.L. Yu
- D.J. Vitkavage
- et al.
- 1985
- JVSTA
Summary Abstract: The origin of oxidation induced enhancement of Si+ sputter yield in SIMS
- D.J. Vitkavage
- J.G. Clabes
- et al.
- 1985
- JVSTA