Summary Abstract: Comparison between the adsorption of PH₃ and B₂H₆ on Si surfaces as related to the CVD of Si

J.C. Marinace

JES

J.K. Gimzewski, T.A. Jung, et al.

Surface Science

R.J. Gambino, N.R. Stemple, et al.

Journal of Physics and Chemistry of Solids

L.K. Wang, A. Acovic, et al.

MRS Spring Meeting 1993