Summary Abstract: The origin of oxidation induced enhancement of Si⁺ sputter yield in SIMS

Biancun Xie, Madhavan Swaminathan, et al.

EMC 2011

Lawrence Suchow, Norman R. Stemple

JES

William Hinsberg, Joy Cheng, et al.

SPIE Advanced Lithography 2010

K.N. Tu

Materials Science and Engineering: A