Microstructure and Schottky barrier height of iridium silicides formed on silicon
- I. Ohdomari
- T.S. Kuan
- et al.
- 2008
- Journal of Applied Physics
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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42 results for T.S. Kuan
Formation of iridium silicides from Ir thin films on Si substrates
- S. Petersson
- J.E.E. Baglin
- et al.
- 2008
- Journal of Applied Physics
Alteration of Cu conductivity in the size effect regime
- S.M. Rossnagel
- T.S. Kuan
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Time development of microstructure and resistivity for very thin Cu films
- S.M. Rossnagel
- T.S. Kuan
- 2002
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Fabrication and performance limits of sub-0.1 μm Cu interconnects
- T.S. Kuan
- C.K. Inoki
- et al.
- 2000
- Materials Research Society Symposium-Proceedings
Fabrication of Cu interconnects of 50 nm linewidth by electron-beam lithography and high-density plasma etching
- Y. Hsu
- T. Standaert
- et al.
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Study of interface abruptness of molecular beam epitaxial GaAs/AlAs superlattices grown on GaAs (311) and (100) substrates
- Y. Hsu
- W.I. Wang
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Molecular-beam epitaxial GaAs/AlAs superlattices in the (311) orientation
- Y. Hsu
- W.I. Wang
- et al.
- 1994
- Physical Review B
Application of electron and ion beam analysis techniques to microelectronics
- T.S. Kuan
- P.E. Batson
- et al.
- 1992
- IBM J. Res. Dev
Hydrogen fluoride vapor etching for Pre-Epi silicon surface preparation
- Robert McIntosh
- Tung-Sheng Kuan
- et al.
- 1992
- Journal of Electronic Materials