About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Publication
Nuclear Inst. and Methods in Physics Research, B
Paper
Use of the SUNY microbeam to investigate effects of mechanical treatment on metal/metal interdiffusion kinetics
Abstract
The SUNY Albany rastered microbeam has been used to investigate the effects of mechanical pretreatment on metal/metal interdiffusion kinetics. Gating on different regions of a RBS spectrum can be used to create "diffusion maps" that reveal the lateral dependence of metal/metal interdiffusion. Al/Hf/Al multilayer thin films were prepared and subjected to a mechanical force applied at one point. Interdiffusion kinetics of Al and Hf was then studied by annealing these samples and using the microbeam to measure RBS spectra as a function of distance from the point of mechanical treatment. It is found that the mechanical pretreatment can have a large effect on the Al/Hf/Al interdiffusion. © 1992.