MEMS 2004
Conference paper

Ultra-small single-crystal silicon cantilevers for scanning force microscopes


We have fabricated ultra-small, -fast, and -sensitive single-crystal silicon cantilevers, allowing at least a factor of 10 improvement in sensitivity and a factor of 20 - 50 enhancement in speed. Two methods allowing a good control of lever length and a miniaturized support chip were developed. These ultra-small cantilevers have excellent mechnical properties and are suitable for use in scanning force microscopes.