Ultra-small single-crystal silicon cantilevers for scanning force microscopes
- J.L. Yang
- M. Despont
- et al.
- 2004
- MEMS 2004
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3 results for A. Engel
Miniaturized single-crystal silicon cantilevers for scanning force microscopy
- J.L. Yang
- M. Despont
- et al.
- 2005
- Applied Physics Letters
A Fabry-Perot interferometer for micrometer-sized cantilevers
- B.W. Hoogenboom
- P.L.T.M. Frederix
- et al.
- 2005
- Applied Physics Letters