Investigations of silicon nano-crystal floating gate memories
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
We describe a very simple modification to a standard bipolar DC corona ionizer which eliminates the ammonium nitrate buildup on the negative corona points, and also eliminates the bursts of submicron particles (tentatively identified as ammonium nitrate) which seem to be the last major source of microcontamination associated with the best modern corona ionizers. The modification consists of a cover which seals to the front of the ionizer, forming a channel, which is supplied with clean, dry nitrogen via a perforated hose. The cover has perforations in front of the corona points to allow the partially ionized nitrogen gas to escape and mix with the ambient air. With water vapour excluded, there is no hydrogen source from which to make ammonia, and so the particle generation ceases. We present data which demonstrates the effectiveness of this method. © 1990.
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020
M. Hargrove, S.W. Crowder, et al.
IEDM 1998