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Applied Physics Letters
Paper

Simulation of backscattered electrons by reflection of primary electrons applied to optimization of detector designs

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Abstract

A method has been developed to minimize the background signal of retarding field analyzers. It uses a negative electrode or negative charge on an insulator to reflect the beam of a scanning electron microscope towards the detector. This beam simulates backscattered electrons so that the response of the detector can be studied and optimized.

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Publication

Applied Physics Letters

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