Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The Schottky barrier heights of scandium deposited on n- and p-type silicon have been measured by the capacitance versus voltage technique. Respective values of about 0.4 and 0.7 eV were determined; they do not change upon the formation of the monosilicide, ScSi, after annealing at 500°C. These results are similar to those obtained with yttrium and the rare-earth metals, in agreement with the respective positions of these elements in the Periodic Table: same column, but fourth, fifth and sixth periods, respectively. © 1991.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R.W. Gammon, E. Courtens, et al.
Physical Review B
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications