Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

PREVAIL-EPL alpha tool: Early results

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The early results obtained with the PREVAIL electron optics subsystem are providing experimental demonstrations of the elements needed for successful subfield stitching. The experiments conducted have exercised the entire system's architecture including proper functionality of the three-dimensional curvilinear variable axis lenses, calibration of all beam parameters, and tuning of dynamic correction elements. Overall, the results show excellent placement repeatability and demonstrate the ability to control size, shape, and orientation of the projected electron beam.