M. Donath, D. Scholl, et al.
Applied Physics A Solids and Surfaces
Three different sputtering approaches are described for the synthesis of garnet films in the thickness range of 0-4 μ. The experimental requirements for producing single-phase, polycrystalline GdIG films are described in some detail, especially in the rf sputtering mode. Unexpectedly large systematic variations in the unit lattice parameter of the garnet structure as a function of film thickness are reported. Possible causes for these systematic structural changes are discussed. © 1968 The American Institute of Physics.
M. Donath, D. Scholl, et al.
Applied Physics A Solids and Surfaces
F. Schoch, E. Kay
The Journal of Chemical Physics
U. Gerlach-Meyer, J.W. Coburn, et al.
Surface Science
E. Sawatzky, E. Kay
Journal of Applied Physics