K. Köhler, J.W. Coburn, et al.
Journal of Applied Physics
Three different sputtering approaches are described for the synthesis of garnet films in the thickness range of 0-4 μ. The experimental requirements for producing single-phase, polycrystalline GdIG films are described in some detail, especially in the rf sputtering mode. Unexpectedly large systematic variations in the unit lattice parameter of the garnet structure as a function of film thickness are reported. Possible causes for these systematic structural changes are discussed. © 1968 The American Institute of Physics.
K. Köhler, J.W. Coburn, et al.
Journal of Applied Physics
E. Kay
Zeitschrift für Physik D Atoms, Molecules and Clusters
D. Treves, J.T. Jacobs, et al.
Journal of Applied Physics
E. Kay, F. Parmigiani, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films