P.S. Bagus, C.J. Nelin, et al.
Journal of Electron Spectroscopy and Related Phenomena
Thin metal films, grown under ion bombardment, usually exhibit optical properties different from bulk. We interpret the observed optical density of thin copper films grown under different conditions of argon-ion bombardment by modifying the bulk dielectric function to take account of changes in the lattice parameter, grain size, and specific density. © 1985 Optical Society of America.
P.S. Bagus, C.J. Nelin, et al.
Journal of Electron Spectroscopy and Related Phenomena
J.B. Torrance, A. Bezinge, et al.
Physical Review B
E. Kay, F. Parmigiani, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
P.B. Comita, W. Jacob, et al.
SPIE Microelectronic Processing Integration 1992