MEMS 2022
Conference paper

Photoconductive Switching of a High-Voltage Actuator Array

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We present a method to control individual high-voltage actuators in an array using microfabricated photoconductive switches and a light projection system, thus overcoming the challenges of on-chip control at high voltages. Such switching capabilities go beyond actuators - our proposed approach may open the door to the ple control of other high-voltage processes, such as MEMS, pressure sensors, and RF devices.