P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Novel low temperature epitaxial growth techniques such as molecular beam epitaxy and low temperature chemical vapor deposition permit the use of pseudomorphic Si1-xGex alloys in silicon technology. The smaller band gap of these alloys allows for a variety of novel band-engineered structures that promise to enhance silicon-based technology significantly. In this brief review, we discuss the growth and properties of pseudomorphic Si1-xGex structures ands then focus on their applications, especially the Si1-xGex base heterojunction bipolar transistor. © 1990.
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Subramanian S. Iyer, C.-Y. Ting, et al.
VLSI Science and Technology 1983