William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Proton-induced X-rays have been used for the measurement of mass absorption coefficients in the 0.1 to 1 keV energy range. In this technique the absorbing film is supported directly on a substrate which under proton bombardment will generate the characteristic substrate radiation whose absorption in the film will be measured. Results are given for twelve different metals at the B K alpha (184 eV) line.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
Michiel Sprik
Journal of Physics Condensed Matter