Publication
SSDM 1990
Conference paper

Low temperature microelectronics

Abstract

Past and present developments toward operating microelectronic circuits at low temperature are reviewed. To assess the future potential of this approach, its advantages and disadvantages are discussed. The fact that devices and materials behave generically better at low temperature will have some bearing on the ultimate attainable technology limits.

Date

Publication

SSDM 1990

Authors

Share