Publication
SPIE Microelectronic Processing Integration 1992
Conference paper
Laser coalescence of gold clusters in gold-fluorocarbon composite films
Abstract
The formation of conducting films from composite films comprised of gold clusters in plasma polymerized polyfluorocarbon (PPFC) is described. A focussed, visible laser beam is used to coalesce the gold clusters within the PPFC matrix. Heating the composite with the laser causes the film to collapse with a loss of weight due to decomposition and volatilization of the polymer. Under the appropriate laser power and scanning conditions, coalescence of the gold particles results in a conducting metal line, exhibiting close to bulk metal resistivity.