About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Publication
SPIE Microelectronic Processing Integration 1992
Conference paper
Laser coalescence of gold clusters in gold-fluorocarbon composite films
Abstract
The formation of conducting films from composite films comprised of gold clusters in plasma polymerized polyfluorocarbon (PPFC) is described. A focussed, visible laser beam is used to coalesce the gold clusters within the PPFC matrix. Heating the composite with the laser causes the film to collapse with a loss of weight due to decomposition and volatilization of the polymer. Under the appropriate laser power and scanning conditions, coalescence of the gold particles results in a conducting metal line, exhibiting close to bulk metal resistivity.