C. Laurent, E. Kay, et al.
Journal of Applied Physics
A method is described to incorporate metals into fluorocarbon polymer films produced in a plasma environment by a simultaneous etching and polymerization process. The emphasis of this work is on a molybdenum-perfluoropropane system, and films produced in this manner were found to contain as much as 20% molybdenum by weight. Some aspects of their structure are discussed. © 1978, Taylor & Francis Group, LLC. All rights reserved.
C. Laurent, E. Kay, et al.
Journal of Applied Physics
M. Donath, D. Scholl, et al.
Physical Review B
J. Perrin, B. Despax, et al.
Physical Review B
D. Scholl, M. Donath, et al.
Physical Review B