UV laser deposition of thin films at 248 NM for phase shifting mask repair
- Janos Farkas
- P.B. Comita
- et al.
- 1994
- MRS Fall Meeting 1994
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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23 results for Paul B. Comita
Surface modification with lasers
- Paul B. Comita
- 2004
- Advanced Materials
New materials for laser repair of active matrix liquid crystal displays
- P.B. Comita
- Carl E. Larson
- 1994
- MRS Spring Meeting 1994
Characterization of low-loss polymer modulators fabricated by laser ablation
- Joseph C. Chon
- John I. Thackara
- et al.
- 1994
- SPIE Optics, Imaging, and Instrumentation 1994
Laser coalescence of gold clusters in gold-fluorocarbon composite films
- P.B. Comita
- W. Jacob
- et al.
- 1992
- SPIE Microelectronic Processing Integration 1992
Laser-induced gold deposition for thin-film circuit repair (Invited Paper)
- T.H. Baum
- P.B. Comita
- et al.
- 1991
- SPIE Microelectronic Processing Integration 1991
Role of Mass Transport in Laser-Induced Chemistry
- Toivo T. Kodas
- Paul B. Comita
- 2002
- Accounts of Chemical Research
Surface chemistry of dimethylaluminum hydride and trimethylaluminum on polycrystalline aluminum
- Daniel R. Strongin
- Paul B. Comita
- 2002
- Journal of Physical Chemistry
Dedicated pre-clean reduces Epi's thermal budget
- Arkadii V. Samoilov
- Dale Du Bois
- et al.
- 2000
- Semiconductor International
Pulsed ultraviolet laser deposition of SiO2 films at 248 nm
- Paul B. Comita
- Janos Farkas
- et al.
- 1995
- Applied Physics Letters