Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A novel sample preparation technique for deposition of small volumes from the liquid phase is described. Samples with diameters as small as 0:5 μm were created with this technique. A series of cantilever geometries was manufactured, with the aim of optimizing the Q-factor. Force sensitivities of 8×10-17 N/√Hz were achieved at room temperature, which is a considerable improvement over commercial cantilevers. Mechanisms which determine Q-factors are discussed briefly. Quantitative understanding of MRFM is absolutely necessary. Calculations of the magnetic field and field gradients for several types of permanent magnets are presented. © 1998 Springer-Verlag.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
J.H. Stathis, R. Bolam, et al.
INFOS 2005