Growth of crystalline defects on the surface of FSG dielectrics

Abstract

Crystalline defects are observed on the surface of fluorosilicate glass (FSG) dielectrics after prolonged storage in air. The crystals have a hexagonal morphology and contain NH 3 and F, suggesting that they consist of NH 4F. Metal maze yields are not affected by the crystals, even though the crystals are present in trenches. However, via resistance and continuity are severely degraded by the crystals, unless a clean is used prior to metallization. © 2004 Materials Research Society.