A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
This paper presents the fabrication and characteristics of a magnetically actuated micromechanical scanner/stage with five degrees of freedom (X, Y, Z, and tilt about the X and Y axes) intended for use as a compact positioning device in parallel scanning probe applications. The entire scanner has a volume of 30×30×2 mm3. It shows a DC displacement amplitude to drive current ratio of 330 nm/mA along the X and Y axes, of 50 nm/mA along the Z axis, and has a resonant frequency in the X/Y plane of 61 Hz.
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
Mark W. Dowley
Solid State Communications
Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films