Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

All-photoplastic, soft cantilever cassette probe for scanning force microscopy

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The fabrication and application of photoplastic scanning force microscopy (SFM) probes has been demonstrated. Simple molding and replication techniques, inexpensive photoplastic material, reusable molds and several layers per probe make it a very attractive for fabricating low-cost photoplastic SFM probes. The good homogeneity of the cantilevers within a cassette and among cassettes over a 4 in. wafer coupled with an appropriate holder provides ease of operation.