Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
The fabrication and application of photoplastic scanning force microscopy (SFM) probes has been demonstrated. Simple molding and replication techniques, inexpensive photoplastic material, reusable molds and several layers per probe make it a very attractive for fabricating low-cost photoplastic SFM probes. The good homogeneity of the cantilevers within a cassette and among cassettes over a 4 in. wafer coupled with an appropriate holder provides ease of operation.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
R.W. Gammon, E. Courtens, et al.
Physical Review B
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989