Microelectronic Engineering

A mass-balanced through-wafer electrostatic x/y-scanner for probe data storage

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In this work we describe the design, fabrication, and testing of a mass-balanced planar x/y-scanner designed for parallel-probe data storage applications. The scanner is actuated by comb drives, whose finger shape is improved using finite-element analysis to increase the force output. A mass-balancing concept is used for in-plane shock resistance; in the out-of-plane direction passive shock resistance is achieved using 1:40 aspect-ratio springs that are fabricated by deep reactive ion etching through the full thickness of a 400 μm wafer. A prototype device is presented and its performance is reported. © 2008 Elsevier B.V. All rights reserved.