Fully subtractive Ru Topvia interconnects with minimum 9 nm-space airgap for RC performance and reliability enhancement as post-Cu interconnects
- Koichi Motoyama
- Jaemyung Choi
- et al.
- 2024
- IEDM 2024
Tenko Yamashita is a principal research scientist and senior manager in the advanced logic pathfinding organization at IBM Research. He is currently leading the CMOS technology research for 1nm and beyond and driving the long-term CMOS transistor roadmap for IBM and for the joint research partners.
Since joined IBM research at Albany in 2009, Tenko has been working on FinFET, Nanosheet, VTFET and recently he is working on the 3D stacked transistors and the advanced interconnect technologies. He has received several Outstanding Technical Achievement Awards (OTAA), Research Division Awards (RDA) for his technical contributions to the early transistor technology developments. Tenko is the recipient of the IBM corporate award, The Best of IBM in 2019 for his contribution to FinFET technology research and IBM Z15 productization.
Tenko has authored or co-authored more than 45 papers in the major semiconductor conferences i.e. IEDM, VLSI Symposium etc and IEEE journals. Tenko is a member of IEEE and currently he is the ALT sub-committee member of IEDM from 2023.
Tenko graduated from Kyushu University, Fukuoka, Japan with a master's degree in physics in 1992.