IBM Lithography Roadmap and Need for Future Lithography Tools
- Allen Gabor
- Martin Burkhardt
- et al.
- 2025
- EUVL and Source Workshop 2025
Dario Goldfarb
Title
Research Staff Member
Publications
Dry heterometallic resist processing based on thermal sublimation deposition and development
- Dario Goldfarb
- Scott Lewis
- et al.
- 2022
- JM3
Patents
- US
- 9915867
- US
- 9389516
- JP
- 5768410
- US
- 9069245
- US
- 9057957
- US
- 9057960
- US
- 9012133
- JP
- 5728822
- TW
- I477529
- CN
- ZL201080036605.6
Top collaborators
LM
Luciana Meli
Senior Manager: Patterning & Metrology
JR
Jed Rankin
Photomask Supply and Development Strategy
AG
Allen Gabor
Distinguished Engineer