IBM Lithography Roadmap and Need for Future Lithography Tools
- Allen Gabor
- Martin Burkhardt
- et al.
- 2025
- EUVL and Source Workshop 2025
Dario Goldfarb
Title
Research Staff Member
Publications
Dry heterometallic resist processing based on thermal sublimation deposition and development
- Dario Goldfarb
- Scott Lewis
- et al.
- 2022
- JM3
Patents
- US
- 7588879
- US
- 7579137
- US
- 7521172
- US
- 7446859
- US
- 7351348
- US
- 7332436
- US
- 7288155
- US
- 7229936
- US
- 6997197
- US
- 6838015
Top collaborators
LM
Luciana Meli
Senior Manager: Patterning & Metrology
JR
Jed Rankin
Photomask Supply and Development Strategy
AG
Allen Gabor
Distinguished Engineer