Highly selective argon-oxygen ion beam etching process for Pb alloys
- D.F. Moore
- H.P. Dietrich
- et al.
- 1985
- JVSTA
Publications
Date
Featured collections
Popular topics
176 results at JVSTA
Summary Abstract: Investigation of the interface chemistry of titanium-tungsten Schottky barrier contacts to silicon by Auger spectroscopy
- J.E. Lewis
- M.O. Aboelfotoh
- et al.
- 1985
- JVSTA
Summary Abstract: The interaction mechanism of inelastic electron tunneling spectroscopy probed by high resolution electron energy loss spectroscopy
- M. Liehr
- P.A. Thiry
- et al.
- 1985
- JVSTA
Chemical reactions at Pt/oxide/Si and Ti/oxide/Si interfaces
- M. Liehr
- F.K. LeGoues
- et al.
- 1985
- JVSTA
Stress modification of WSi2.2 films by concurrent low energy ion bombardment during alloy evaporation
- D.S. Yee
- J. Floro
- et al.
- 1985
- JVSTA
Summary Abstract: Resistivity-process relationships in TiSi2 formed from Ti-Si reaction couples
- H.-O. Blom
- S. Berg
- et al.
- 1985
- JVSTA
Secondary electron effect on power-voltage relationship in rf sputtering
- B. Bumble
- J.J. Cuomo
- 1985
- JVSTA
Formation of TiSi2 and TiN during nitrogen annealing of magnetron sputtered Ti films
- E.D. Adams
- K.Y. Ahn
- et al.
- 1985
- JVSTA
Summary Abstract: Chemical processes in fluorine-based etching reactions
- F.R. McFeely
- 1985
- JVSTA
Summary Abstract: Laser-assisted dry process soldering
- P.A. Moskowitz
- A. Davidson
- 1985
- JVSTA